Fin differential mos varactor diode

ABSTRACT

The embodiments of the invention provide a structure, method, etc. for a fin differential MOS varactor diode. More specifically, a differential varactor structure is provided comprising a substrate with an upper surface, a first vertical anode plate, and a second vertical anode plate electrically isolated from the first vertical anode plate. Moreover, a semiconductor fin comprising a cathode is between the first vertical anode plate and the second vertical anode plate, wherein the semiconductor fin, the first vertical anode plate, and the second vertical anode plate are each positioned over the substrate and perpendicular to the upper surface of the substrate.

BACKGROUND

1. Field of the Invention

The embodiments of the invention provide a structure, method, etc. for a fin differential metal oxide semiconductor (MOS) varactor diode.

2. Description of the Related Art

Variable reactor (varactor) diodes are popular devices in analog/mixed signal technologies. Such diodes are components in voltage-controlled oscillator (VCO) and phase-locked loop (PLL) circuits. A figure of merit is quality factor (Q), which is improved by reducing parasitic resistances and capacitances. Commonly these devices are used in differential mode, and Q can be improved by designing the device specifically for this use.

One method of reducing parasitic resistance is to provide separate positive and negative signal anodes with a common cathode, usually with interdigitated planar anodes.

This is formed by interdigitated anode fingers, alternating positive and negative terminals. Parasitic resistance is decreased between positive and negative terminals as signal path through cathode buried layer and sinker contact is eliminated. However, the signal path still includes a lateral component. In other words, resistance is reduced down to and through the cathode and cathode contact, but there is still a significant lateral resistance between anodes.

SUMMARY

The embodiments of the invention provide a structure, method, etc. for a fin differential MOS varactor diode. More specifically, a differential varactor structure is provided comprising a substrate with an upper surface, a first vertical anode plate, and a second vertical anode plate electrically isolated from the first vertical anode plate. Moreover, a semiconductor fin comprising a cathode is between the first vertical anode plate and the second vertical anode plate, wherein the semiconductor fin, the first vertical anode plate, and the second vertical anode plate are each positioned over the substrate perpendicular to the upper surface of the substrate.

Furthermore, a first insulator plate is provided between the first vertical anode plate and the semiconductor fin; and, a second insulator plate is provided between the second vertical anode plate and the semiconductor fin. The structure may also include one or more additional vertical anode plates proximate the second vertical anode plate and one or more additional semiconductor fins between the second vertical anode plate and the additional vertical anode plates. The additional vertical anode plates and the additional semiconductor fins are positioned over the substrate perpendicular to the upper surface of the substrate. Moreover, a top of the first vertical anode plate, a top of the second vertical anode plate, and a top of the additional vertical anode plates are planar with each other. The structure may further include spacers between the semiconductor fin and the first vertical anode plate and the second vertical anode plate, wherein the spacers separate the semiconductor fin from the first vertical anode plate and the second vertical anode plate.

A method of forming a differential varactor structure is also provided, wherein the method begins by forming a substrate comprising an upper surface. Next, a semiconductor fin is formed over the substrate perpendicular to the upper surface of the substrate. First and second vertical anode plates are then formed proximate the semiconductor fin, such that the first and second vertical anode plates are over the substrate and perpendicular to the upper surface of the substrate. The first and second vertical anode plates are formed such that the semiconductor fin is between the second vertical anode plate and the first vertical anode plate, and such that the second vertical anode plate is electrically isolated from the first vertical anode plate. Thus, the forming of the semiconductor fin comprises forming the semiconductor fin such that the semiconductor fin allows the first vertical anode plate to be proximate and electrically isolated from the second vertical anode plate.

Prior to the forming of the first vertical anode plate and the second vertical anode plate, the method forms a first insulator plate and a second insulator plate, such that the first insulator plate is on a first sidewall of the semiconductor fin, and such that the second insulator plate is on a second sidewall of the semiconductor fin. The first and second insulator plates are formed such that the first insulator plate is between the semiconductor fin and the first vertical anode plate, and such that the second insulator plate is between the semiconductor fin and the second vertical anode plate.

Furthermore, prior to the forming of the first and second vertical anode plates, an insulator can be formed over the semiconductor fin. The forming of the first and second vertical anode plates can include forming the first and second vertical anode plates above the insulator, such that the insulator allows the first and second vertical anode plates to be self-aligned to a top of the semiconductor fin.

Also prior to the forming of the first and second vertical anode plates, spacers can be formed over the semiconductor fin. The forming of the first and second vertical anode plates can include forming the first and second vertical anode plates such that the spacers are between the semiconductor fin and the first and second vertical anode plates.

Additionally, the forming of the semiconductor fin includes forming one or more additional semiconductor fins over the substrate perpendicular to the upper surface of the substrate. The forming of the second vertical anode plate includes forming one or more additional vertical anode plates over the substrate perpendicular to the upper surface of the substrate, such that the additional semiconductor fin is between the second vertical anode plate and the additional vertical anode plate.

Accordingly, the embodiments of the invention form two electrically isolated vertical anode plates on opposite sides of a semiconductor fin structure. The silicon fin forms the common cathode. The fin structure allows the two capacitors to be placed in close proximity. This reduces the parasitic resistance much further than could be achieved with an interdigitated planar structure.

These and other aspects of the embodiments of the invention will be better appreciated and understood when considered in conjunction with the following description and the accompanying drawings. It should be understood, however, that the following descriptions, while indicating preferred embodiments of the invention and numerous specific details thereof, are given by way of illustration and not of limitation. Many changes and modifications may be made within the scope of the embodiments of the invention without departing from the spirit thereof, and the embodiments of the invention include all such modifications.

BRIEF DESCRIPTION OF THE DRAWINGS

The embodiments of the invention will be better understood from the following detailed description with reference to the drawings, in which:

FIG. 1 is a diagram illustrating a differential MOS varactor;

FIGS. 2A, 2B, 2C, 2D, and 2E are diagrams illustrating a method of forming a self-aligned differential MOS varactor;

FIGS. 3A, 3B, 3C, 3D, and 3E are diagrams illustrating a method of forming a non self-aligned differential MOS varactor;

FIG. 4A is a diagram illustrating a top view of a self-aligned differential MOS varactor;

FIG. 4B is a diagram illustrating a cross-sectional view of the self-aligned differential MOS varactor of FIG. 4A;

FIG. 5A is a diagram illustrating a top view of a non self-aligned differential MOS varactor;

FIG. 5B is a diagram illustrating a cross-sectional view of the non self-aligned differential MOS varactor of FIG. 5A;

FIGS. 6A-6B are flow diagrams illustrating a method of forming a differential varactor structure.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

The embodiments of the invention and the various features and advantageous details thereof are explained more fully with reference to the non-limiting embodiments that are illustrated in the accompanying drawings and detailed in the following description. It should be noted that the features illustrated in the drawings are not necessarily drawn to scale. Descriptions of well-known components and processing techniques are omitted so as to not unnecessarily obscure the embodiments of the invention. The examples used herein are intended merely to facilitate an understanding of ways in which the embodiments of the invention may be practiced and to further enable those of skill in the art to practice the embodiments of the invention. Accordingly, the examples should not be construed as limiting the scope of the embodiments of the invention.

The embodiments of the invention form two electrically isolated vertical anode plates on opposite sides of a semiconductor fin structure. The silicon fin forms the common cathode. The fin structure allows the two capacitors to be placed in close proximity. This reduces the parasitic resistance much further than could be achieved with an interdigitated planar structure.

A MOS varactor diode is formed with a series of one or more sets of: a first capacitor plate of semiconductor material (also referred to herein as the “fin”), an insulating dielectric (also referred to herein as the “insulator”) on opposite vertical surfaces of said semiconductor followed by a second capacitor plate (also referred to herein as the “first vertical anode plate”) on one vertical surface and a third capacitor plate (also referred to herein as the “second vertical anode plate”) on the opposite vertical surface, moreover being constructed such that each capacitor plate is electrically isolated from the others.

The second and third capacitor plates are separated on the top of the semiconductor material (the fin) by an insulating layer that fully covers the top of the fin allowing the capacitor plates to be self-aligned to the top of the fin. The second and third capacitor plates extend over the top of the fin some distance, and are separated by an insulating spacer formed on the sidewalls of the edge of the fin.

A method is provided for integrating a vertical fin MOS structure with planer isolation structure in which the same lithography and etch used to define the shallow trench isolation defines the vertical fin and the same lithography and etch steps are used to define the gate poly in both the vertical and planar structures. A method is also provided for forming a vertical fin MOS structure of minimal topography with separate self-aligned gates on opposite fin surfaces using a chemical mechanical polishing (CMP) process.

As illustrated in FIG. 1, a differential MOS varactor 100 is formed comprising a fin 130 on a substrate 105. A positive plate 110 (also referred to herein as the “first vertical anode plate”) and a negative plate 120 (also referred to herein as the “second vertical anode plate”) are also provided on opposite sides of a fin structure 130 (also referred to herein as the “fin”). A first insulator 140 and a second insulator 150 are also provided. Specifically, the first insulator 140 is between the positive anode plate 110 and the fin structure 130; and, the second insulator 150 is between the negative anode plate 120 and the fin structure 130. Additionally, the differential MOS varactor 100 includes a Vtune component 160 proximate the positive plate 110. Parasitic resistance from between terminals is minimized. Also, the “plates” and “fins” discussed herein are generally 3-dimensional rectangular structures that extend perpendicularly from the layer on which they are formed. Thus, with the above structure, the plates and fins discussed herein have a height above the substrate that is greater than their cross-sectional width.

Referring now to FIGS. 2A-2E, a method is illustrated of forming a self-aligned differential MOS varactor 200. The method begins by completing a standard complementary metal oxide semiconductor (CMOS) or bipolar CMOS (BiCMOS) process through wells, including subcollector and deep trench (DT) if present, shallow trench isolation (STI), planarization, and well implant. The varactor body is formed with an n-type well (NW) implant. A nitride layer is deposited on top of a pad oxide. The nitride layer will serve as a chemical mechanical polish (CMP) stop and a silicide block. The thickness of the nitride layer must be sufficient such that nitride remains at the time of silicide formation. Similar methods are described in United States Patent Application Publication No. 2005/0161769 to Coolbaugh et al., which if fully incorporated herein by reference.

Specifically, as illustrated in FIG. 2A, a first STI region 240 is formed in a p-silicon substrate 210 by a method known to the art. An NW layer 220 and a p-type well (BF) component 230 are formed in a p-silicon substrate 210, for example by ion implantation. The NW layer 220 is proximate the BF component 230, wherein the NW layer 220 and the BF component 230 are substantially equal in height and may extend to a depth underneath the STI region 240. The first STI region 240 is formed where the NW layer 220 contacts the BF component 230. Additionally, additional STI regions 242 are formed in an upper portion of the NW layer 220; and, a nitride layer 250 is formed over the BF component 230, the NW layer 220, the first STI region 240, and the second STI region 242.

Next, with a first new mask level, a fin pattern is defined in photoresist, the pattern thereby being transferred into the nitride 250 and silicon 220 by means of an etch. Lithography and etch are similar to those used in the STI and is known to the art. Thus, as illustrated in FIG. 2B, fins 222, 224, and 226 are formed in the NW layer 220.

The method then grows a thermal oxide. To minimize the thermal cycle, rapid thermal oxidation (RTO) or high pressure oxidation (HiPOX) may be performed. Polysilicon is deposited, wherein the polysilicon is either in-situ doped or doped by implantation after deposition.

Specifically, as illustrated in FIG. 2C, oxide members 260 a, 260 b, 260 c, and 260 d are formed in the NW layer 220. The oxide members 260 a and 260 b are on opposite sidewalls of the fin 222; the oxide members 260 b and 260 c are on opposite sidewalls of the fin 224; and, the oxide members 260 c and 260 d are on opposite sidewalls of the fin 226. Moreover, polysilicon or other conductor 270 is deposited over the nitride layer 250 and the oxide members 260 a, 260 b, 260 c, and 260 d. As such, polysilicon members 270 a, 270 b, 270 c, and 270 d are formed on the oxide members 260 a, 260 b, 260 c, and 260 d, respectively. Top surfaces of the polysilicon members 270 a, 270 b, 270 c, and 270 d are approximately planar with a top surface of the nitride layer 250. The fin 222 is between the polysilicon members 270 a and 270 b; the fin 224 is between the polysilicon members 270 b and 270 c; and, the fin 226 is between the polysilicon members 270 c and 270 d.

CMP is subsequently performed on the polysilicon, stopping in the nitride. With a second new mask level, the method masks the structure and etches the nitride film stopping on the pad oxide. As illustrated in FIG. 2D, the polysilicon 270 is removed above the nitride layer 250, wherein the polysilicon members 270 a, 270 b, 270 c, and 270 d remain at and below the top surface of the nitride layer 250. Furthermore, portions of the nitride layer 250 are removed by an anisotropic etch such that only nitride members (i.e., spacers) 250 a, 250 b, 250 c, 250 d, and 250 e remain proximate the polysilicon members 270 a, 270 b, 270 c, and 270 d. The nitride members 250 a and 250 b are on opposite sidewalls of the polysilicon member 270 a; the nitride members 250 b and 250 c are on opposite sidewalls of the polysilicon member 270 b; the nitride members 250 c and 250 d are on opposite sidewalls of the polysilicon member 270 c; and, the nitride members 250 d and 250 e are on opposite sidewalls of the polysilicon member 270 d.

Following this, CMOS or BiCMOS processing is continued, including gate oxidation, areas of polysilicon (PC), spacers, extensions, and any bipolar processing. The n+ source/drain (S/D) implant is used in the body contact 280 and 282. Silicide formation is performed, wherein silicide on top of the fins is blocked by nitride spacers 250 a-250 e. The method then contacts the top of the polysilicon. As illustrated in FIG. 2E, an n+ region 280 is formed in a top portion of the NW layer 220, wherein the n+ region 280 is adjacent the first STI region 240, and wherein the n+ region 280 is between the first STI region 240 and the fin 222. An additional n+ region 282 is also formed in the top portion of the NW layer 220, wherein the n+ region 282 is adjacent the second STI region 242, and wherein the n+ region 282 is between the second STI region 242 and the fin 226. Additionally, metal contacts 290 a-290 f (also referred to herein as “Vtune components” or “vertical anode plate(s)”) are formed by any manner known to the art. Specifically, the contact 290 a is formed on the region 280; the contact 290 b is formed on the polysilicon member 270 a; the contact 290 c is formed on the polysilicon member 270 b; the contact 290 d is formed on the polysilicon member 270 c; the contact 290 e is formed on the polysilicon member 270 d; and, the contact 290 f is formed on region 282. Similar to the differential MOS varactor 100 shown in FIG. 1, each fin is between a pair of vertical anode plates.

Referring now to FIGS. 3A-3E, as an alternative embodiment, a method is illustrated of forming a non self-aligned differential MOS varactor 300. The method shown in FIGS. 3A-3E begins by completing a CMOS or BiCMOS process through wells. NW 320 is used for the varactor body. The 322, 324, and 326 fin structures are defined using RX etch and filled with STI 340. Using a new mask level, a window is defined in resist over the structure. More specifically, as illustrated in FIG. 3A, an NW layer 320 and a BF component 330 are formed on a p-silicon substrate 310. The NW layer 320 is proximate the BF component 330, wherein the NW layer 320 and the BF component 330 are substantially equal in height. STI regions 340 a, 340 b, 340 c, 340 d, 340 e, and 340 f are formed in upper portions of the NW layer 320. The STI region 340 a is formed in upper portions of the NW layer 320 and the BF component 330, where the NW layer 320 contacts the BF component 330. Additionally, a photoresist 350 a and 350 b is formed over substantially the entire surface of the substrate, being patterned to remove the resist of regions 340 b, 340 c, 340 d, and 340 e.

Next, the STI regions that are not under a resist are removed, for example with a hydrofluoric acid (HF) etch. The resist is stripped and field effect transistor (FET) processing is continued. Specifically, as illustrated in FIG. 3B, the STI regions 340 b, 340 c, 340 d, 340 e and the resists 350 a and 350 b are removed. As such, fins 322, 324, and 326 are formed in the NW layer 320.

Following this, a FET gate oxidation and polysilicon deposition forms a MOS structure over the fins. As illustrated in FIG. 3C, an oxide layer 360 is formed in upper portions of the BF component 330 and the NW layer 320, such that fins 322, 324, and 326 are covered by the oxide layer 360. Moreover, a polysilicon layer 370 is formed on the oxide layer 360, the STI region 340 a, and the STI region 340 f.

A photolithography and polysilicon etch is subsequently used to separate the polysilicon capacitor plates 370 a, 370 b, 370 c, and 370 d on the top of the fins 322, 324, and 326. This step is preferably the same process used to define the polysilicon gates of the FETs, thereby forming said gates concurrently with capacitor plates 370 a, 370 b, 370 c, and 370 d. Likewise, the processing used to form dielectric spacers proximate to the gates of a typical self-aligned FET process known to the art will concurrently form spacers 380 a, 380 b, 380 c, 380 d, 380 e, and 380 f. Spacers may be composed of any dielectric material, for example silicon nitride or silicon dioxide. The space between 370 a and 370 b may be reduced to allow spacers 380 a and 380 b to merge. Similarly, 380 c and 380 d may merge by suitable spacing of 372 a and 372 b and 380 e and 380 f may merge by suitable spacing of 370 c and 370 d. As illustrated in FIG. 3D, portions of the polysilicon layer 370 are removed such that only polysilicon members 370 a, 370 b, 370 c, and 370 d remain in the non self-aligned differential MOS varactor 300. The fin 322 is between the polysilicon members 370 a and 370 b; the fin 324 is between the polysilicon members 370 b and 370 c; and, the fin 326 is between the polysilicon members 370 c and 370 d. Notches 372 a and 372 b are in upper portions of the polysilicon members 370 b and 370 c, respectively.

Furthermore, spacers 380 a and 380 b are formed on sidewalls of the polysilicon members 370 a and 370 b, respectively, wherein the spacers 380 a and 380 b are between the polysilicon member 370 a and the polysilicon member 370 b. Spacers 380 c and 380 d are formed on sidewalls of the polysilicon members 370 b and 370 c, respectively, wherein the spacers 380 c and 380 d are between the notches 372 a and 372 b of the polysilicon member 370 b and the polysilicon member 370 c, respectively. Spacers 380 e and 380 f are formed on sidewalls of the polysilicon members 370 c and 370 d, respectively, wherein the spacers 380 e and 380 f are between the notch 372 b of the polysilicon member 370 c and the polysilicon member 370 d.

The method then implants an n+ dopant (preferably the same as that used for the FET source/drain) into the structure, and forms silicide and contacts. The contacts can be made at either the tops or bottoms of the fins. More specifically, as illustrated in FIG. 3E portions of the oxide layer 360 are removed such that only oxide members 360 a, 360 b, 360 c, 360 d, and 360 e remain on the non self-aligned differential MOS varactor 300. The fin 322 is between the oxide members 360 a and 360 b; the fin 324 is between the oxide members 360 b and 360 c; the fin 324 is between the oxide members 360 c and 360 d; and, the STI region 340 f is between the oxide members 360 d and 360 e. Moreover, the oxide member 360 a is between the fin 322 and the polysilicon member 370 a; the oxide member 360 b is between the fins 322 and 324 the polysilicon member 370 b; the oxide member 360 c is between the fins 324 and 326 and the polysilicon member 370 c; the oxide member 360 d is between the fin 326 and the polysilicon member 370 d; and, the oxide member 360 e is on the NW layer 320 adjacent the STI region 340 f.

Silicide members 390 a, 390 b, 390 c, 390 d, and 390 e are formed on the NW layer 320, wherein the silicide member 390 a is between the STI region 340 a and the oxide member 360 a, and wherein the silicide member 390 b is between the oxide member 360 a and the oxide member 360 b. The silicide member 390 c is between the oxide member 360 b and the oxide member 360 c; the silicide member 390 d is between the oxide member 360 c and the oxide member 360 d; and, the silicide member 390 e is between the oxide member 360 d and the STI region 340 f. Additionally, a silicide member 390 f is formed on the polysilicon member 370 a; silicide members 390 g and 390 h are formed on the polysilicon member 370 b; silicide members 390 i and 390 j are formed on the polysilicon member 370 c; and, a silicide member 390 k is formed on the polysilicon member 370 d. The notch 372 a is between the silicide members 390 g and 390 h; and, the notch 372 b is between the silicide members 390 i and 390 j. Furthermore, contacts 395 a, 395 b, 395 c, 395 d, 395 e, 395 f, 395 g, and 395 h (also referred to herein as “Vtune components” or “vertical anode plate(s)”) are formed on the silicide members 390 a, 390 f, 390 g, 390 h, 390 i, 390 j, 390 k, and 390 e, respectively. Similar to the differential MOS varactor 100 shown in FIG. 1, each fin is between a pair of vertical anode plates.

FIGS. 4A-4B illustrate, in a view planar to the substrate (4A) and in section through the substrate (4B), a self-aligned differential MOS varactor 400 comprising an n-silicon layer 420 on a p-silicon substrate layer 410. The n-silicon layer 420 includes fins 422 a, 422 b, and 422 c. An n+ region 430 is on a top surface of a first side of the n-silicon layer 420; and, an n+ region 432 is on a top surface of a second side of the n-silicon layer 420. An oxide layer 440 is also on the top surface of the n-silicon layer 420, between the source region 430 and the drain region 432, wherein the oxide layer 440 covers sidewalls and top surfaces of the fins 422 a, 422 b, and 422 c.

Moreover, polysilicon members 450 a, 450 b, 450 c, and 450 d are on the oxide layer 440. Specifically, the fin 422 a is between the polysilicon members 450 a and 450 b; the fin 422 b is between the polysilicon members 450 b and 450 c; and, the fin 422 c is between the polysilicon members 450 c and 450 d. Nitride members 460 a, 460 b, 460 c, 460 d, and 460 e are on the oxide layer 440 not covered by the polysilicon members 450 a, 450 b, 450 c, and 450 d. The polysilicon member 450 a is between the nitride members 460 a and 460 b; the polysilicon member 450 b is between the nitride members 460 b and 460 c; the polysilicon member 450 c is between the nitride members 460 c and 460 d; and, the polysilicon member 450 d is between the nitride members 460 d and 460 e. Furthermore, the nitride members 460 b, 460 c, and 460 d are over the fins 422 a, 422 b, and 422 c, respectively.

The device also comprises anode contacts 470 a, 470 b, 470 c, and 470 d in upper recesses of the polysilicon members 450 a, 450 b, 450 c, and 450 d, respectively. Anode contacts 470 a and 470 c can be connected by a first conductor (not shown) by any manner known to the art. Anode contacts 470 b and 470 d are likewise connected by a second conductor (not shown). Thus the first conductor forms one anode terminal of the differential pair, and the second conductor forms the other anode terminal. Contacts 480 b-480 f comprise the Vtune terminal; the capacitance of the device may be modulated by varying the voltage potential on this terminal. Similar to the differential MOS varactor 100 shown in FIG. 1, each fin is between a pair of vertical anode plates.

Referring now to FIGS. 5A-5B, a non self-aligned differential MOS varactor 500 is shown comprising an n-silicon layer 520 on a p-silicon substrate layer 510. The n-silicon layer 520 includes fins 522 a, 522 b, and 522 c. An n+ region 530 is on a top surface of a first side of the n-silicon layer 520; and, an n+ region 532 is on a top surface of a second side of the n-silicon layer 520. An oxide layer 540 is also on the top surface of the n-silicon layer 520, between the source region 530 and the drain region 532, wherein the oxide layer 540 covers sidewalls and top surfaces of the fins 522 a, 522 b, and 522 c.

Moreover, polysilicon members 550 a, 550 b, 550 c, and 550 d are on the oxide layer 540, wherein the polysilicon members 550 a, 550 b, 550 c, and 550 d are on sidewalls and upper edges of the fins 522 a, 522 b, and 522 c. More specifically, the fin 522 a is between the polysilicon members 550 a and 550 b; the fin 522 b is between the polysilicon members 550 b and 550 c; and, the fin 522 c is between the polysilicon members 550 c and 550 d. Spacers 560 a and 560 b are adjacent opposite sidewalls of the polysilicon member 550 a; spacers 560 c and 560 f are adjacent opposite outer sidewalls of the polysilicon member 550 b; spacers 560 d and 560 e are adjacent opposite inner sidewalls of the polysilicon member 550 b; spacers 560 g and 560 j are adjacent opposite outer sidewalls of the polysilicon member 550 c; spacers 560 h and 560 i are adjacent opposite inner sidewalls of the polysilicon member 550 c; and, spacers 560 k and 560 l are adjacent opposite sidewalls of the polysilicon member 550 d. The spacer 560 a is over the polysilicon member 550 a; the spacers 560 b and 560 c are over the fin 522 a; the spacers 560 d and 560 e are over the polysilicon member 550 b; the spacers 560 f and 560 g are over the fin 522 b; the spacers 560 h and 560 i are over the polysilicon member 550 c; the spacers 560 j and 560 k are over the fin 522 c; and, the spacer 560 l is over the polysilicon member 550 d. A top portion of the polysilicon member 550 a is between the spacers 560 a and 560 b; a first top portion of the polysilicon member 550 b is between the spacers 560 c and 560 d; a second top portion of the polysilicon member 550 b is between the spacers 560 e and 560 f, a first top portion of the polysilicon member 550 c is between the spacers 560 g and 560 h; a second top portion of the polysilicon member 550 c is between the spacers 560 i and 560 j; and, a top portion of the polysilicon member 550 d is between the spacers 560 k and 560 l.

The device also comprises anode contacts 570 a, 570 b, 570 c, 570 d, 570 e, and 570 f on the top portion of the polysilicon member 550 a, the first top portion of the polysilicon member 550 b, the second top portion of the polysilicon member 550 b, the first top portion of the polysilicon member 550 c, the second top portion of the polysilicon member 550 c, and the top portion of the polysilicon member 550 d, respectively. Contacts 570 a, 570 d, and 570 e are electrically connected by conductor 590 a by any manner known to the art. Contacts 470 b, 570 c, and 570 f are likewise connected by conductor 590 b. Thus 590 a comprises one anode of the differential pair and conductor 590 b comprises the other anode of the differential pair. Vtune components 580 a, 580 c, and 580 e are also provided on the n+ region 530; and, Vtune components 580 b, 580 d, and 580 f are provided on the n+ region 532. Though four-anode devices are shown in the illustrations, the method and structure can be expanded to any number of anodes.

Accordingly, the embodiments of the invention provide a structure, method, etc. for a fin differential MOS varactor diode. More specifically, a differential varactor structure is provided comprising a substrate with an upper surface, a first vertical anode plate, and a second vertical anode plate electrically isolated from the first vertical anode plate. Moreover, a semiconductor fin comprising a cathode is between the first vertical anode plate and the second vertical anode plate, wherein the semiconductor fin, the first vertical anode plate, and the second vertical anode plate are each positioned over the substrate perpendicular to the upper surface of the substrate. As described above, the fin structure allows the two capacitors to be placed in close proximity. This reduces the parasitic resistance much further than could be achieved with an interdigitated planar structure.

Furthermore, a first insulator plate is provided between the first vertical anode plate and the semiconductor fin; and, a second insulator plate is provided between the second vertical anode plate and the semiconductor fin. As described above, FIG. 4B illustrates the oxide layer 440 on the top surface of the n-silicon layer 420, between the source region 430 and the drain region 432, wherein the oxide layer 440 covers sidewalls and top surfaces of the fins 422 a, 422 b, and 422 c.

The structure may also include one or more additional vertical anode plates proximate the second vertical anode plate. For example, see the contacts 470 c and 470 d in FIGS. 4A-4B. Further, one or more additional semiconductor fins can be between the second vertical anode plate and the additional vertical anode plates. For example, see the fins 422 b and 422 c in FIG. 4B. The additional vertical anode plates and the additional semiconductor fins are positioned over the substrate perpendicular to the upper surface of the substrate. Moreover, a top of the first vertical anode plate, a top of the second vertical anode plate, and a top of the additional vertical anode plates are planar with each other. As described above, the non self-aligned differential MOS varactor 500 comprises the vertical anode plates 570 a, 570 b, 570 c, 570 d, 570 e, and 570 f on the top portion of the polysilicon member 550 a, the first top portion of the polysilicon member 550 b, the second top portion of the polysilicon member 550 b, the first top portion of the polysilicon member 550 c, the second top portion of the polysilicon member 550 c, and the top portion of the polysilicon member 550 d, respectively.

The structure may further include spacers between the semiconductor fin and the first vertical anode plate and the second vertical anode plate, wherein the spacers separate the semiconductor fin from the first vertical anode plate and the second vertical anode plate. As described above, FIG. 5B illustrates the non self-aligned differential MOS varactor 500, wherein the spacers 560 a and 560 b are adjacent opposite sidewalls of the polysilicon member 550 a; the spacers 560 c and 560 f are adjacent opposite outer sidewalls of the polysilicon member 550 b; the spacers 560 d and 560 e are adjacent opposite inner sidewalls of the polysilicon member 550 b; the spacers 560 g and 560 j are adjacent opposite outer sidewalls of the polysilicon member 550 c; the spacers 560 h and 560 i are adjacent opposite inner sidewalls of the polysilicon member 550 c; and, the spacers 560 k and 560 l are adjacent opposite sidewalls of the polysilicon member 550 d.

A method of forming a differential varactor structure is also provided, wherein the method begins by forming a substrate comprising an upper surface. Next, a semiconductor fin is formed over the substrate perpendicular to the upper surface of the substrate. As described above, with a first new mask level, a fin pattern is defined in photoresist when nitride and silicon are etched. Lithography and etch is similar to active area (RX) level.

First and second vertical anode plates are then formed proximate the semiconductor fin, such that the first and second vertical anode plates are over the substrate and perpendicular to the upper surface of the substrate. The first and second vertical anode plates are formed such that the semiconductor fin is between the second vertical anode plate and the first vertical anode plate, and such that the second vertical anode plate is electrically isolated from the first vertical anode plate. Thus, the forming of the semiconductor fin comprises forming the semiconductor fin such that the semiconductor fin allows the first vertical anode plate to be proximate and electrically isolated from the second vertical anode plate. As illustrated in FIG. 2D, the contact 290 b is formed on the polysilicon member 270 a; the contact 290 c is formed on the polysilicon member 270 b; the contact 290 d is formed on the polysilicon member 270 c; and, the contact 290 e is formed on the polysilicon member 270 d.

Prior to the forming of the first vertical anode plate and the second vertical anode plate, the method forms a first insulator plate and a second insulator plate, such that the first insulator plate is on a first sidewall of the semiconductor fin, and such that the second insulator plate is on a second sidewall of the semiconductor fin. The first and second insulator plates are formed such that the first insulator plate is between the semiconductor fin and the first vertical anode plate, and such that the second insulator plate is between the semiconductor fin and the second vertical anode plate. As described above, to minimize the thermal cycle, RTO or HiPOX may be performed to grow the thermal oxide.

Furthermore, prior to the forming of the first and second vertical anode plates, an insulator can be formed over the semiconductor fin. The forming of the first and second vertical anode plates can include forming the first and second vertical anode plates above the insulator, such that the insulator allows the first and second vertical anode plates to be self-aligned to a top of the semiconductor fin. As described above, portions of the nitride layer 250 are removed such that only the nitride members 250 a, 250 b, 250 c, 250 d, and 250 e remain proximate the polysilicon members 270 a, 270 b, 270 c, and 270 d. The nitride members 250 a and 250 b are on opposite sidewalls of the polysilicon member 270 a; the nitride members 250 b and 250 c are on opposite sidewalls of the polysilicon member 270 b; the nitride members 250 c and 250 d are on opposite sidewalls of the polysilicon member 270 c; and, the nitride members 250 d and 250 e are on opposite sidewalls of the polysilicon member 270 d.

Also prior to the forming of the first and second vertical anode plates, spacers can be formed over the semiconductor fin. The forming of the first and second vertical anode plates can include forming the first and second vertical anode plates such that the spacers are between the semiconductor fin and the first and second vertical anode plates. As described above, FET spacer processing forms spacers. Groundrules may be modified to allow spacers to merge.

Additionally, the forming of the semiconductor fin includes forming one or more additional semiconductor fins over the substrate perpendicular to the upper surface of the substrate. The forming of the second vertical anode plate includes forming one or more additional vertical anode plates over the substrate perpendicular to the upper surface of the substrate, such that the additional semiconductor fin is between the second vertical anode plate and the additional vertical anode plate. As described above, the contacts 395 b, 395 c, 395 d, 395 e, 395 f, and 395 g are formed on the silicide members 390 f, 390 g, 390 h, 390 i, 390 j, and 390 k, respectively.

Referring now to FIGS. 6A-6B, flow diagrams of a method of forming a differential varactor structure are illustrated. The method begins in item 600 by forming a substrate comprising an upper surface. Next, in item 610, a semiconductor fin is formed over the substrate perpendicular to the upper surface of the substrate. As described above, with a first new mask level, a fin pattern is defined in photoresist when nitride and silicon are etched. Lithography and etch is similar to active area (RX) level. This involves, in item 612, forming the semiconductor fin such that the semiconductor fin allows the first vertical anode plate to be proximate and electrically isolated from the second vertical anode plate. Moreover, in item 614, at least one additional semiconductor fin is formed over the substrate perpendicular to the upper surface of the substrate. As illustrated in FIG. 2B, the fins 222, 224, and 226 are formed in the NW layer 220.

Subsequently, in item 620, a first insulator plate and a second insulator plate are formed prior to the forming of the first and second vertical anode plates. As illustrated in FIG. 2C, the oxide members 260 a, 260 b, 260 c, and 260 d are formed in the NW layer 220. The oxide members 260 a and 260 b are on opposite sidewalls of the fin 222; the oxide members 260 b and 260 c are on opposite sidewalls of the fin 224; and, the oxide members 260 c and 260 d are on opposite sidewalls of the fin 226.

Furthermore, in item 630, an insulator can be formed over the semiconductor fin prior to the forming of the first and second vertical anode plates. As described above, portions of the nitride layer 250 are removed such that only nitride members 250 a, 250 b, 250 c, 250 d, and 250 e remain proximate the polysilicon members 270 a, 270 b, 270 c, and 270 d. The nitride members 250 a and 250 b are on opposite sidewalls of the polysilicon member 270 a; the nitride members 250 b and 250 c are on opposite sidewalls of the polysilicon member 270 b; the nitride members 250 c and 250 d are on opposite sidewalls of the polysilicon member 270 c; and, the nitride members 250 d and 250 e are on opposite sidewalls of the polysilicon member 270 d.

Additionally, in item 640, spacers can be formed over the semiconductor fin prior to the forming of the first and second vertical anode plates. As described above, FET spacer processing forms spacers. Groundrules may be modified to allow spacers to merge.

Following this, in item 650, first and second vertical anode plates are formed proximate the semiconductor fin, such that the first and second vertical anode plates are over the substrate and perpendicular to the upper surface of the substrate. As illustrated in FIG. 2D, the contact 290 b is formed on the polysilicon member 270 a; the contact 290 c is formed on the polysilicon member 270 b; the contact 290 d is formed on the polysilicon member 270 c; and, the contact 290 e is formed on the polysilicon member 270 d. This involves, in item 652, forming the first vertical anode plate such that the first insulator plate is between the semiconductor fin and the first vertical anode plate. Also, in item 654, the method forms the first vertical anode plate above the insulator, such that the insulator allows the first vertical anode plate to be self-aligned to a top of the semiconductor fin. Further, in item 656, the method can form the first vertical anode plate such that the spacers are between the semiconductor fin and the first vertical anode plate.

The first and second vertical anode plates are formed such that the semiconductor fin is between the second vertical anode plate and the first vertical anode plate, and such that the second vertical anode plate is electrically isolated from the first vertical anode plate. As described above, the contacts 395 b, 395 c, 395 d, 395 e, 395 f, and 395 g are formed on the silicide members 390 f, 390 g, 390 h, 390 i, 390 j, and 390 k, respectively. This involves, in item 658, forming the second vertical anode plate such that the second insulator plate is between the semiconductor fin and the second vertical anode plate. In addition, in item 660, the method forms the second vertical anode plate above the insulator, such that the insulator allows the second vertical anode plate to be self-aligned to a top of the semiconductor fin. Moreover, in item 662, the method forms the second vertical anode plate such that the spacers are between the semiconductor fin and the second vertical anode plate. Further, in item 664, at least one additional vertical anode plate is formed over the substrate perpendicular to the upper surface of the substrate, such that the additional semiconductor fin is between the second vertical anode plate and the additional vertical anode plate.

Accordingly, the embodiments of the invention form two electrically isolated vertical anode plates on opposite sides of a semiconductor fin structure. The silicon fin forms the common cathode. The fin structure allows the two capacitors to be placed in close proximity. This reduces the parasitic resistance much further than could be achieved with an interdigitated planar structure.

The foregoing description of the specific embodiments will so fully reveal the general nature of the invention that others can, by applying current knowledge, readily modify and/or adapt for various applications such specific embodiments without departing from the generic concept, and, therefore, such adaptations and modifications should and are intended to be comprehended within the meaning and range of equivalents of the disclosed embodiments. It is to be understood that the phraseology or terminology employed herein is for the purpose of description and not of limitation. Therefore, while the embodiments of the invention have been described in terms of preferred embodiments, those skilled in the art will recognize that the embodiments of the invention can be practiced with modification within the spirit and scope of the appended claims. 

1. A differential varactor structure, comprising: a substrate comprising an upper surface; a first vertical anode plate positioned over said substrate, wherein said first vertical anode plate is positioned perpendicularly to said upper surface of said substrate; a second vertical anode plate electrically isolated from said first vertical anode plate, wherein said second vertical anode plate is positioned over said substrate, and wherein said second vertical anode plate is positioned perpendicularly to said upper surface of said substrate; and a semiconductor fin between said first vertical anode plate and said second vertical anode plate, wherein said semiconductor fin is positioned over said substrate, and wherein said semiconductor fin is positioned perpendicularly to said upper surface of said substrate.
 2. The structure according to claim 1, further comprising: a first insulator plate between said first vertical anode plate and said semiconductor fin; and a second insulator plate between said second vertical anode plate and said semiconductor fin.
 3. The structure according to claim 1, further comprising: at least one additional vertical anode plate proximate said second vertical anode plate, wherein said additional vertical anode plate is positioned over said substrate, and wherein said additional vertical anode plate is positioned perpendicularly to said upper surface of said substrate; and at least one additional semiconductor fin between said second vertical anode plate and said additional vertical anode plate, wherein said additional semiconductor fin is positioned over said substrate, and wherein said additional semiconductor fin is positioned perpendicularly to said upper surface of said substrate.
 4. The structure according to claim 3, wherein a top of said first vertical anode plate, a top of said second vertical anode plate, and a top of said at least one additional vertical anode plate are planar with each other.
 5. The structure according to claim 1, further comprising spacers between said semiconductor fin and said first vertical anode plate and said second vertical anode plate, wherein said spacers separate said semiconductor fin from said first vertical anode plate and said second vertical anode plate.
 6. The structure according to claim 1, wherein said fin comprises a cathode.
 7. A differential varactor structure, comprising: a substrate comprising an upper surface; a first vertical anode plate positioned over said substrate, wherein said first vertical anode plate is positioned perpendicularly to said upper surface of said substrate; a second vertical anode plate electrically isolated from said first vertical anode plate, wherein said second vertical anode plate is positioned over said substrate, and wherein said second vertical anode plate is positioned perpendicularly to said upper surface of said substrate; a semiconductor fin between said first vertical anode plate and said second vertical anode plate, wherein said semiconductor fin is positioned over said substrate, and wherein said semiconductor fin is positioned perpendicularly to said upper surface of said substrate; a first insulator plate that contacts said first vertical anode plate and said semiconductor fin; and a second insulator plate that contacts said second vertical anode plate and said semiconductor fin.
 8. The structure according to claim 7, further comprising: at least one additional vertical anode plate proximate said second vertical anode plate, wherein said additional vertical anode plate is positioned over said substrate, and wherein said additional vertical anode plate is positioned perpendicularly to said upper surface of said substrate; and at least one additional semiconductor fin between said second vertical anode plate and said additional vertical anode plate, wherein said additional semiconductor fin is positioned over said substrate, and wherein said additional semiconductor fin is positioned perpendicularly to said upper surface of said substrate.
 9. The structure according to claim 8, wherein a top of said first vertical anode plate, a top of said second vertical anode plate, and a top of said at least one additional vertical anode plate are planar with each other.
 10. The structure according to claim 7, further comprising spacers between said semiconductor fin and said first vertical anode plate and said second vertical anode plate, wherein said spacers separate said semiconductor fin from said first vertical anode plate and said second vertical anode plate.
 11. A method of forming a differential varactor structure, comprising: forming a semiconductor fin over a substrate such that said semiconductor fin is perpendicular to an upper surface of said substrate; and forming a first vertical anode plate and a second vertical anode plate proximate said semiconductor fin, such that said first vertical anode plate and said second vertical anode plate are over said substrate and perpendicular to said upper surface of said substrate, such that said semiconductor fin is between said second vertical anode plate and said first vertical anode plate, and such that said second vertical anode plate is electrically isolated from said first vertical anode plate.
 12. The method according to claim 11, further comprising forming a first insulator plate and a second insulator plate prior to said forming of said first vertical anode plate and said second vertical anode plate, such that said first insulator plate is between said semiconductor fin and said first vertical anode plate, and such that said second insulator plate is between said semiconductor fin and said second vertical anode plate.
 13. The method according to claim 11, wherein said forming of said semiconductor fin comprises forming at least one additional semiconductor fin over said substrate such that said additional semiconductor fin is perpendicular to said upper surface of said substrate, and wherein said forming of said second vertical anode plate comprises forming at least one additional vertical anode plate over said substrate such that said additional vertical anode plate is perpendicular to said upper surface of said substrate, and such that said at least one additional semiconductor fin is between said second vertical anode plate and said at least one additional vertical anode plate.
 14. The method according to claim 11, further comprising, prior to said forming of said first vertical anode plate and said second vertical anode plate, forming an insulator over said semiconductor fin, wherein said forming of said first vertical anode plate and said second vertical anode plate comprises forming said first vertical anode plate and said second vertical anode plate above said insulator, such that said insulator allows said first vertical anode plate and said second vertical anode plate to be self-aligned to a top of said semiconductor fin.
 15. The method according to claim 11, further comprising, prior to said forming of said first vertical anode plate and said second vertical anode plate, forming spacers over said semiconductor fin, wherein said forming of said first vertical anode plate and said second vertical anode plate comprises forming said first vertical anode plate and said second vertical anode plate such that said spacers are between said semiconductor fin and said first vertical anode plate and said second vertical anode plate.
 16. The method according to claim 11, wherein said forming of said semiconductor fin comprises forming said semiconductor fin such that said semiconductor fin allows said first vertical anode plate to be proximate and electrically isolated from said second vertical anode plate.
 17. A method of forming a differential varactor structure, comprising: forming a semiconductor fin over a substrate such that said semiconductor fin is perpendicular to an upper surface of said substrate; forming a first insulator plate and a second insulator plate, such that said first insulator plate is on a first sidewall of said semiconductor fin, and such that said second insulator plate is on a second sidewall of said semiconductor fin; forming a first vertical anode plate and a second vertical anode plate over said substrate and perpendicular to said upper surface of said substrate, such that said first insulator plate is between said first vertical anode plate and said semiconductor fin, such that said second insulator plate is between said second vertical anode plate and said semiconductor fin, such that said semiconductor fin is between said second vertical anode plate and said first vertical anode plate, and such that said second vertical anode plate is electrically isolated from said first vertical anode plate.
 18. The method according to claim 17, wherein said forming of said semiconductor fin comprises forming at least one additional semiconductor fin over said substrate such that said additional semiconductor fin is perpendicular to said upper surface of said substrate, and wherein said forming of said second vertical anode plate comprises forming at least one additional vertical anode plate over said substrate such that said additional vertical anode plate is perpendicular to said upper surface of said substrate, and such that said at least one additional semiconductor fin is between said second vertical anode plate and said at least one additional vertical anode plate.
 19. The method according to claim 17, further comprising, prior to said forming of said first vertical anode plate and said second vertical anode plate, forming spacers over said semiconductor fin, wherein said forming of said first vertical anode plate and said second vertical anode plate comprises forming said first vertical anode plate and said second vertical anode plate such that said spacers are between said semiconductor fin and said first vertical anode plate and said second vertical anode plate.
 20. The method according to claim 17, wherein said forming of said semiconductor fin comprises forming said semiconductor fin such that said semiconductor fin allows said first vertical anode plate to be proximate and electrically isolated from said second vertical anode plate. 